Optimizing CD variation and defect reduction comprehensively, to improve results of a wide defect process window with a narrow CD distribution. This study focused on the defect behavior analysis with ...

Semiconductors may be small, but the impacts they have are significant. Semiconductors used in life-dependent applications, such as pacemakers, defibrillators, life support systems, automotive safety ...

Continuous casting remains a critical process in modern steel production, whereby molten steel is poured into a mould and solidified into semi-finished forms such as blooms, billets or slabs. This ...