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Optimizing CD variation and defect reduction comprehensively, to improve results of a wide defect process window with a narrow CD distribution. This study focused on the defect behavior analysis with ...

Metrology is the science of measuring, characterizing, and analyzing materials. Within metrology, there are several technologies used to detect material defects on a very small scale – precision on ...

This research introduced an innovative approach utilizing the electron wind force (EWF) to achieve defect annealing at significantly lower temperatures. The primary goal was to assess this method’s ...