As semiconductor devices become more complex, so do the methods for patterning them. Ever-smaller features at each new node require continuous advancements in photolithography techniques and ...

Layout decomposition represents a critical step in the semiconductor manufacturing process, whereby integrated circuit designs are partitioned into multiple layers or masks to overcome the inherent ...

(Nanowerk Spotlight) Nanotechnology device fabrication – from electronics to photonics, security, biotechnology and medicine – often requires some form of nanopatterning technique in order to achieve ...