One of the biggest challenges for nanoscale fabrication is how to measure devices on such a minute scale. As the semiconductor industry demands ever smaller devices, the need for reliable, robust ...

Spectroscopic ellipsometry based on photoelastic modulation delivers very high accuracy and repeatability. Owing to this technology the UVISEL allows the unique combination of high performance and ...

Imaging spectropolarimetry techniques represent a blend of spectroscopy, imaging, and polarimetry to provide comprehensive information on the optical properties of targets. These methods enable the ...

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